Using Quality Function Deployment in Singulation Process Analysis

This paper presents the application of quality function deployment (QFD) to process analysis. QFD has been applied in various industries since the 1960s, but traditional QFD methodologies still have many limitations. An improved QFD framework is proposed, in which, customer requirements are identified through value engineering and strategic analysis. Process mapping using the IDEF methodology is then employed to formulate the design specification of a system before the “House of Quality” is applied. A case study is conducted to demonstrate the usefulness of the proposed framework in analyzing the effectiveness and performance of two types of sigulation processes in semi-conductor industry.